Materials and Failures in MEMS and NEMS
Book Details
Format
Hardback or Cased Book
ISBN-10
1119083605
ISBN-13
9781119083603
Publisher
John Wiley & Sons Inc
Imprint
Wiley-Scrivener
Country of Manufacture
US
Country of Publication
GB
Publication Date
Sep 28th, 2015
Print length
432 Pages
Weight
934 grams
Dimensions
26.20 x 18.50 x 2.80 cms
Product Classification:
Circuits & components
AI Summary
Ksh 31,850.00
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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.
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