Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
Book Details
Format
Hardback or Cased Book
ISBN-10
0080436099
ISBN-13
9780080436098
Publisher
Elsevier Science & Technology
Imprint
Elsevier Science Ltd
Country of Manufacture
US
Country of Publication
GB
Publication Date
Sep 8th, 1999
Print length
206 Pages
Weight
154 grams
Product Classification:
Circuits & components
AI Summary
Ksh 24,850.00
Manufactured on Demand
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Includes papers that cover the E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment. This book covers a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, and wafer characterization.
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