Spectroscopic Ellipsometry and Reflectometry : A User's Guide
Book Details
Format
Hardback or Cased Book
ISBN-10
0471181722
ISBN-13
9780471181729
Publisher
John Wiley & Sons Inc
Imprint
Wiley-Interscience
Country of Manufacture
US
Country of Publication
GB
Publication Date
Apr 6th, 1999
Print length
248 Pages
Weight
516 grams
Dimensions
16.30 x 23.70 x 1.90 cms
Product Classification:
Optical physicsMaterials science
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While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.
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