Spectroscopic Ellipsometry : Principles and Applications
Book Details
Format
Hardback or Cased Book
ISBN-10
0470016086
ISBN-13
9780470016084
Publisher
John Wiley & Sons Inc
Imprint
John Wiley & Sons Inc
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Jan 26th, 2007
Print length
392 Pages
Weight
762 grams
Dimensions
23.50 x 15.70 x 2.60 cms
Product Classification:
Optical physics
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
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