Nanoimprint Lithography: An Enabling Process for Nanofabrication
Softcover Reprint of the Original 1st 2013 ed.
by
Weimin Zhou
Book Details
Format
Paperback / Softback
ISBN-10
3662510863
ISBN-13
9783662510865
Edition
Softcover Reprint of the Original 1st 2013 ed.
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint
Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Country of Manufacture
DE
Country of Publication
GB
Publication Date
Aug 23rd, 2016
Print length
249 Pages
Weight
416 grams
Dimensions
23.30 x 15.60 x 1.80 cms
Product Classification:
NanotechnologyMaterials scienceElectronics engineeringElectronic devices & materials
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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
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