Book Details
Format
Paperback / Softback
Book Series
Microsystems and Nanosystems
ISBN-10
3030589102
ISBN-13
9783030589103
Edition
2021 ed.
Publisher
Springer Nature Switzerland AG
Imprint
Springer Nature Switzerland AG
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Nov 19th, 2021
Print length
174 Pages
Product Classification:
Materials scienceElectronics engineering
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This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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