Introduction to Microelectronic Fabrication

For courses in Theory and Fabrication of Integrated Circuits, this text presents a survey of the techniques in the field. It assumes a minimal knowledge of integrated circuits and of terminal behaviour of electronic components such as resistors, diodes, and MOS and bipolar transistors.

For courses in Theory and Fabrication of Integrated Circuits.

The author''s goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.

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