Hf-Based High-k Dielectrics : Process Development, Performance Characterization, and Reliability
Book Details
Format
Paperback / Softback
ISBN-10
3031014243
ISBN-13
9783031014246
Publisher
Springer International Publishing AG
Imprint
Springer International Publishing AG
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Dec 31st, 2007
Print length
92 Pages
Product Classification:
Materials scienceElectrical engineering
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Hard breakdown and soft breakdown, particularly the Weibull slopes, were studied under constant voltage stress. The origin of soft breakdown (first breakdown) was studied and the results suggested that the soft breakdown may be due to one layer breakdown in the bilayer structure (HfO2/SiO2: 4 nm/4 nm).
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