Handbook of Thin Film Process Technology : 98/1 Reactive Sputtering

by David A Glocker

Book Details

Format Hardback or Cased Book

ISBN-10 1315893681

ISBN-13 9781315893686

Publisher Taylor & Francis Ltd

Imprint CRC Press

Country of Manufacture GB

Country of Publication GB

Publication Date Nov 29th, 2017

Print length 90 Pages

Weight 330 grams

Product Classification: Condensed matter physics (liquid state & solid state physics)

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Ksh 28,800.00

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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician.

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.

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