Handbook for Cleaning for Semiconductor Manufacturing : Fundamentals and Applications
Book Details
Format
Hardback or Cased Book
Book Series
Wiley-Scrivener
ISBN-10
0470625953
ISBN-13
9780470625958
Publisher
John Wiley & Sons Inc
Imprint
Wiley-Scrivener
Country of Manufacture
US
Country of Publication
GB
Publication Date
Feb 4th, 2011
Print length
614 Pages
Weight
1,276 grams
Dimensions
18.50 x 26.30 x 4.30 cms
Product Classification:
Precision instruments manufactureSemi-conductors & super-conductors
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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.
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