Flash Lamp Annealing : From Basics to Applications

2019 ed.

by Denise Reichel , Lars Rebohle , Slawomir Prucnal

Book Details

Format Paperback / Softback

Book Series Springer Series in Materials Science

ISBN-10 3030233014

ISBN-13 9783030233013

Edition 2019 ed.

Publisher Springer Nature Switzerland AG

Imprint Springer Nature Switzerland AG

Country of Manufacture GB

Country of Publication GB

Publication Date Aug 14th, 2020

Print length 288 Pages

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Ksh 19,800.00

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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

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