Book Details
Format
Paperback / Softback
ISBN-10
0199861226
ISBN-13
9780199861224
Edition
4 Revised edition
Publisher
Oxford University Press Inc
Imprint
Oxford University Press Inc
Country of Manufacture
US
Country of Publication
GB
Publication Date
Dec 20th, 2012
Print length
688 Pages
Weight
1,075 grams
Dimensions
19.20 x 23.60 x 2.60 cms
Product Classification:
Engineering: generalMechanical engineering & materialsElectric motors
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
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