Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
1st ed. 2022
Book Details
Format
Paperback / Softback
ISBN-10
3658359250
ISBN-13
9783658359256
Edition
1st ed. 2022
Publisher
Springer Fachmedien Wiesbaden
Imprint
Springer Vieweg
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Nov 17th, 2021
Print length
163 Pages
Product Classification:
Engineering measurement & calibrationApplied opticsLaser technology & holography
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During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated.
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