Advanced MEMS/NEMS Fabrication and Sensors
2022 ed.
Book Details
Format
Hardback or Cased Book
ISBN-10
3030797481
ISBN-13
9783030797485
Edition
2022 ed.
Publisher
Springer Nature Switzerland AG
Imprint
Springer Nature Switzerland AG
Country of Manufacture
GB
Country of Publication
GB
Publication Date
Oct 13th, 2021
Print length
312 Pages
Product Classification:
Cybernetics & systems theoryMaterials scienceElectronics engineering
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
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